Microelectromechanical Systems III: Fabrication Fundamentals
Source: https://www.udemy.com/course/microelectromechanical-systems-3-fabrication-fundamentals/
What you’ll learn
- Differentiate between bulk and surface micromachining strategies to select the appropriate fabrication flow for complex three-dimensional micro-structures.
- Analyze core microfabrication processes—including photolithography, thin-film deposition, and anisotropic etching—to predict their impact on device geometry
- Execute a multi-user MEMS process (PolyMUMPs) design flow, utilizing sacrificial layer release techniques and established design rules
- Evaluate industrial packaging and testing constraints, addressing why housing and physical stimuli requirements often dominate the total cost and reliability
Requirements
- B.S or graduate students, Mechanical engineering, Manufacturing Engineering, Aerospace Engineering, Electronics Engineering, Physics, Technicians with industry experience.
Download Links
Password: cms.ddpanda.org
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